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Volumn 163-164, Issue , 2003, Pages 689-694
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Composite coating materials for the moulding of diffractive and refractive optical components of inorganic glasses
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Author keywords
Film stress; Glass moulding; Oxidation behaviour; Superlattice structure
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Indexed keywords
GLASS;
LITHOGRAPHY;
MICROLENSES;
OXIDATION;
SUPERLATTICES;
THERMOGRAVIMETRIC ANALYSIS;
MOULDING TOOLS;
COMPOSITE MATERIALS;
COATING;
COMPOSITE;
MOLDING;
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EID: 0037472661
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00658-8 Document Type: Article |
Times cited : (49)
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References (14)
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