Vertically aligned nanopillar arrays with hard skins using anodic aluminum oxide for nano imprint lithography

Chemistry of Materials

Volumn 17, Issue 24, 2005, Pages 6181-6185

  Lee, Pyung Soo ^a   Lee, Ok Joo ^a   Hwang, Sun Kyu ^a   Jung, Seung Ho ^a   Jee, Sang Eun ^a   Lee, Kun Hong ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ARRAYS; MELTING; NANOTECHNOLOGY; SPUTTERING; SUBSTRATES;

ALUMINUM MELTING; ALUMINUM SPUTTERING; NANO-PILLAR ARRAYS;

NANOSTRUCTURED MATERIALS;

EID: 28944433009     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm051855j     Document Type: Article

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