Enhanced interface mixing of Fe/Si bilayers on preamorphized silicon substrates

Applied Physics Letters

Volumn 90, Issue 5, 2007, Pages

  Bibic N ^d   Milinovic V ^d   Lieb, K P ^b   Milosavljevic M ^a   Schrempel, F ^c  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b UNIVERSITY OF GÖTTINGEN   (Germany)

^c FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; IRON COMPOUNDS; IRRADIATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

FESI BILAYERS; ION-BEAM MIXING; PREAMORPHIZATION; STRUCTURAL CHARACTERIZATION;

ION BEAMS;

EID: 33846949688     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2432952     Document Type: Article

References (30)

1. National Technology Roadmap for Semiconductors, Semiconductors Industry Association, San Jose, 1995.
2. K. Kimura, A. Agarwal, H. Toyofuku, K. Nakjima, and H-J. Gossman, Nucl. Instrum. Methods Phys. Res. B 148, 284 (1999).
3. A. Agarwal, T. E. Haynes, D. J. Eagelsham, H.-J. Gossmann, D. C. Jacobson, J. M. Poate, and Yu. E. Erokhin, Appl. Phys. Lett. 70, 3332 (2000).
4. J. C. Kim, J.-Y. Ji, J. S. Kline, J. R. Tucker, and T.-C. Then, Appl. Surf. Sci. 220, 293 (2003).
5. Y. Murakami, I. Tsunoda, H. Kido, A. Kenjo, T. Sadoh, M. Miayo, and T. Yoshitake, Nucl. Instrum. Methods Phys. Res. B 206, 304 (2003).
6. K. A. Gable, L. S. Robertson, A. Jain, and K. S. Jones, J. Appl. Phys. 97, 044501 (2005).
7. E. J. Tan, M. L. Kon, K. L. Pey, P. S. Lee, Y. W. Zhang, W. D. Wang, and D. Z. Chi, Thin Solid Films 504, 157 (2006).
8. D. Leong, M. Harry, K. J. Reeson, and K. P. Homewood, Nature (London) 387, 686 (1997).
9. I. D́zsi, Cs. Fetzer, M. Kiss, H. Pattyn, A. Vantomme, and G. Langouche, Appl. Phys. Lett. 76, 1917 (2000).
10. V. E. Borisenko, Semiconducting Silicides (Springer, Berlin, 2000).
11. S. Dhar, P. Schaaf, N. Bibić, E. Hooker, M. Milosavjević, and K. P. Lieb, Appl. Phys. A: Mater. Sci. Process. 76, 773 (2003).
12. M. Milosavljević, N. Bibić, S. Dhar, K. P. Lieb, P. Schaaf, Y.-L. Huang, and M. Seibt, J. Appl. Phys. 90, 4474 (2001).
13. M. Milosavljević, G. Shao, N. Bibić, C. N. McKinty, C. Jeynes, and K. P. Home-wood, Appl. Phys. Lett. 79, 1438 (2001).
14. N. Bibić, S. Dhar, K. P. Lieb, M. Milosavljević, P. Schaaf, Y. L. Huang, M. Seibt, K. P. Homewood, and C. McKinty, Surf. Coat. Technol. 158/159, 98 (2002).
15. M. Milosavljević, G. Shao, R. M. Gwilliam, Y. Gao, M. A. Lourenco, R. Valizadeh, J. S. Colligon, and K. P. Homewood, Thin Solid Films 461, 72 (2004).
16. M. Naito, M. Ishimura, Y. Hirotsu, J. A. Valdez, and K. E. Sickafus, Appl. Phys. Lett. 87, 241905 (2005).
17. M. Uhrmacher, K. Pampus, F. J. Bergmeister, D. Purschke, and K. P. Lieb, Nucl. Instrum. Methods Phys. Res. B 9, 234 (1985).
18. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985); code SRIM2004, http://www.srim. org.
19. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985); code SRIM2004, http://www.srim. org.
20. L. R. Doolittle, Nucl. Instrum. Methods Phys. Res. B 0168-583X 9, 344 (1985); N. P. Barradas, C. Jeynes, and R. P. Webb, Appl. Phys. Lett. 71, 291 (1997).
21. L. R. Doolittle, Nucl. Instrum. Methods Phys. Res. B 0168-583X 9, 344 (1985); N. P. Barradas, C. Jeynes, and R. P. Webb, Appl. Phys. Lett. 71, 291 (1997).
22. P. Sigmund and A. Gras-Marti, Nucl. Instrum. Methods 182/183, 25 (1981).
23. Y. -T. Cheng, Mater. Sci. Rep. 5, 45 (1990).
24. W. Bolse, Mater. Sci. Eng., R. 0927-796X 12, 40 (1994); W. Bolse, Nucl. Instrum. Methods Phys. Res. B 148, 83 (1999).
25. W. Bolse, Mater. Sci. Eng., R. 0927-796X 12, 40 (1994); W. Bolse, Nucl. Instrum. Methods Phys. Res. B 148, 83 (1999).
26. J. Desimoni and A. Traverse, Phys. Rev. B 0163-1829 10.1103/PhysRevB.48. 13266 48, 13266 (1993); S. Dhar, Y. N. Mohapatra, and V. N. Kulkarni, Phys. Rev. B 54, 5769 (1996).
27. J. Desimoni and A. Traverse, Phys. Rev. B 0163-1829 10.1103/PhysRevB.48. 13266 48, 13266 (1993); S. Dhar, Y. N. Mohapatra, and V. N. Kulkarni, Phys. Rev. B 54, 5769 (1996).
28. M.-O. Ruault, M. C. Ridgway, F. Fortuna, H. Bernas, and J. S. Williams, Eur. Phys. J.: Appl. Phys. 23, 39 (2003).
29. W. Berky, S. Gottschalk, R. G. Elliman, and A. G. Balogh, Nucl. Instrum. Methods Phys. Res. B 249, 200 (2006).
30. K. Zhang, K. P. Lieb, V. Milinović, and P. K. Sahoo, J. Appl. Phys. 100, 053501 (2006).