Enhanced solid-phase growth of β-FeSi2 by pre-amorphization

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 304-307

  Murakami, Y ^a   Tsunoda, I ^a   Kido, H ^a   Kenjo, A ^a   Sadoh, T ^a   Miyao, M ^a   Yoshitake, T ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

FeSi2; Ion irradiation; Pre amorphization; Semiconducting silicide

Indexed keywords

AMORPHIZATION; ANNEALING; AUGER ELECTRON SPECTROSCOPY; GROWTH (MATERIALS); IRON COMPOUNDS; POSITIVE IONS; RELAXATION PROCESSES; SILICON;

SOLID-PHASE GROWTH;

ION BOMBARDMENT;

EID: 0038243540     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00750-X     Document Type: Conference Paper

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