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Volumn 32, Issue 1, 2007, Pages 16-22

Nanometer-scale laser direct-write using near-field optics

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; IRRADIATION; LIGHT ABSORPTION; MAGNETOELECTRIC EFFECTS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; NEAR FIELD SCANNING OPTICAL MICROSCOPY; OPTICAL FIBERS;

EID: 33846798332     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2007.10     Document Type: Article
Times cited : (31)

References (49)
  • 25
    • 0003705852 scopus 로고    scopus 로고
    • Electromagnetic Simulation and Modeling with Applications in Lithography,
    • PhD thesis, University of California, Berkeley
    • T.V. Pistor, "Electromagnetic Simulation and Modeling with Applications in Lithography," PhD thesis, University of California, Berkeley, 2001.
    • (2001)
    • Pistor, T.V.1
  • 40
    • 85039225372 scopus 로고    scopus 로고
    • A. Chimmalgi, D.J. Hwang, and C.P. Grigoropoulos, presented at 2005 Conf. on Laser Ablation (COLA '05), J. Phys. D (2006) in press.
    • A. Chimmalgi, D.J. Hwang, and C.P. Grigoropoulos, presented at 2005 Conf. on Laser Ablation (COLA '05), J. Phys. D (2006) in press.
  • 43
    • 84926175671 scopus 로고    scopus 로고
    • Pulsed Laser Processing of Electronic Materials in Micro/Nanoscale,
    • PhD dissertation, University of California, Berkeley
    • D.J. Hwang, "Pulsed Laser Processing of Electronic Materials in Micro/Nanoscale," PhD dissertation, University of California, Berkeley, 2005.
    • (2005)
    • Hwang, D.J.1
  • 44
    • 0042538881 scopus 로고
    • K.G. Ibbs and R.M. Osgood, eds, Cambridge University Press, Cambridge, UK
    • K.G. Ibbs and R.M. Osgood, eds., Laser Chemical Processing for Microelectronics (Cambridge University Press, Cambridge, UK, 1989).
    • (1989) Laser Chemical Processing for Microelectronics


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.