Relationship between fluence gradient and lateral grain growth in spatially controlled excimer laser crystallization of amorphous silicon films

Journal of Applied Physics

Volumn 88, Issue 9, 2000, Pages 4994-4999

  Lee, Minghong ^a   Moon, Seungjae ^a   Hatano, Mutsuko ^b   Suzuki, Kenkichi ^b   Grigoropoulos, Costas P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001014103     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1314303     Document Type: Article

References (11)

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