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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 1 A, 2005, Pages 75-81

Structural studies of high-performance low-k dielectric materials improved by electron-beam curing

(9) Yoda, Takashi a Nakasaki, Yasushi a Hashimoto, Hideki b Fujita, Keiji a Miyajima, Hideshi a Shimada, Miyoko a Nakata, Rempei a Kaji, Naruhiko a Hayasaka, Nobuo a

a TOSHIBA CORPORATION (Japan)

b TORAY RESEARCH CENTER INC (Japan)

Author keywords

Cu damascene; EB curing; EXAFS; Ladder structure; Low k dielectric; Methylsilsesquioxane; Random structure; XAFS; XANES

Indexed keywords

ABSORPTION; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; CURING; ELECTRON BEAMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

CU DAMASCENE; EB CURING; EXTENDED X-RAY ABSORPTION FINE STRUCTURE (EXAFS); LADDER STRUCTURES; LOW-K DIELECTRIC; METHYLSILSQUIOXANE; RANDOM STRUCTURES; X-RAY ABSORPTION FINE STRUCTURE (XAFS); X-RAY ABSORPTION NEAR-EDGE STRUCTURE (XANES);

DIELECTRIC MATERIALS;

EID: 15544366132 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.44.75 Document Type: Article

Times cited : (16)

References (20)

1
- 0036045161
- S. M. Jang, Y. H. Chen, T. J. Chou, S. N. Lee, C. C. Chen, T. C. Tseng, B. T. Chen, C. H. Yu and M. S. Liang: Proc. VLSI Symp. (2002) p. 18.
- (2002) Proc. VLSI Symp. , pp. 18
- Jang, S.M.¹ Chen, Y.H.² Chou, T.J.³ Lee, S.N.⁴ Chen, C.C.⁵ Tseng, T.C.⁶ Chen, B.T.⁷ Yu, C.H.⁸ Liang, M.S.⁹

2
- 15544366253
- M. Rasco, K. Mosig, J. Ling, P. Elenius, R. Augur, P. Gillespie and J. Bamia: Proc. SEMI JAPAN (2002) p. 7.
- (2002) Proc. SEMI JAPAN , pp. 7
- Rasco, M.¹ Mosig, K.² Ling, J.³ Elenius, P.⁴ Augur, R.⁵ Gillespie, P.⁶ Bamia, J.⁷

3
- 77953155518
- M. R. Miller and P. S. Ho: Proc. ECTC (2001) p. 965.
- (2001) Proc. ECTC , pp. 965
- Miller, M.R.¹ Ho, P.S.²

4
- 15544377526
- M. Shimada, H. Miyajima, R. Nakata and T. Yoda: Proc. SSDM (2001) p. 416.
- (2001) Proc. SSDM , pp. 416
- Shimada, M.¹ Miyajima, H.² Nakata, R.³ Yoda, T.⁴

5
- 0026845704
- M. Wada, K. Kamiya and H. Nasu: Phys.Chem. Glasses 33 (1992) 56.
- (1992) Phys.Chem. Glasses , vol.33 , pp. 56
- Wada, M.¹ Kamiya, K.² Nasu, H.³

6
- 5744255220
- R. Mitsumoto, E. Ito, T. Araki, Y. Ouchi, K. Seki, S. Yajima, F. Okino, H. Touhara, K. Kikuchi and Y. Achiba: Physica B 208&209 (1995) 543.
- (1995) Physica B , vol.208-209 , pp. 543
- Mitsumoto, R.¹ Ito, E.² Araki, T.³ Ouchi, Y.⁴ Seki, K.⁵ Yajima, S.⁶ Okino, F.⁷ Touhara, H.⁸ Kikuchi, K.⁹ Achiba, Y.¹⁰

7
- 0035293722
- D. Kondo, K. Sakamoto, H. Takeda, F. Matsui, T. Ohta, K. Amemiya, W. Uchida and A. Kasuya: J. Synchrotron Rad. 8 (2001) 505.
- (2001) J. Synchrotron Rad. , vol.8 , pp. 505
- Kondo, D.¹ Sakamoto, K.² Takeda, H.³ Matsui, F.⁴ Ohta, T.⁵ Amemiya, K.⁶ Uchida, W.⁷ Kasuya, A.⁸

8
- 34047264492
- M. Imamura, H. Shimada, H. Matsubayashi, M. Yumura, K. Uchida, S. Oshima, Y. Kuriki, Y. Yoshimura, T. Sato and A. Nishijima: Physica B 208&209 (1995) 541.
- (1995) Physica B , vol.208-209 , pp. 541
- Imamura, M.¹ Shimada, H.² Matsubayashi, H.³ Yumura, M.⁴ Uchida, K.⁵ Oshima, S.⁶ Kuriki, Y.⁷ Yoshimura, Y.⁸ Sato, T.⁹ Nishijima, A.¹⁰

9
- 18044400008
- W. F. Pong, C. L. Yueh, Y. D. Chang, M.-H. Tsai, Y. K. Chang, Y. Y. Chen, J. F. Lee, S. L. Wei, C. Y. Wen, L. C. Chen, K. H. Chen, I. N. Lin and H. F. Cheng: J. Synchrotron Rad. 8 (2001) 145.
- (2001) J. Synchrotron Rad. , vol.8 , pp. 145
- Pong, W.F.¹ Yueh, C.L.² Chang, Y.D.³ Tsai, M.-H.⁴ Chang, Y.K.⁵ Chen, Y.Y.⁶ Lee, J.F.⁷ Wei, S.L.⁸ Wen, C.Y.⁹ Chen, L.C.¹⁰ Chen, K.H.¹¹ Lin, I.N.¹² Cheng, H.F.¹³

10
- 0000376083
- I. Davoli, E. Paris, S. Stizza, M. Benfatto, M. Fanfoni, A. Gargano, A. Bianconi and F. Seifert: Phys. Chem. Minerals 19 (1992) 171.
- (1992) Phys. Chem. Minerals , vol.19 , pp. 171
- Davoli, I.¹ Paris, E.² Stizza, S.³ Benfatto, M.⁴ Fanfoni, M.⁵ Gargano, A.⁶ Bianconi, A.⁷ Seifert, F.⁸

11
- 0014585991
- R. L. Mozzi and B. E. Warren: J. Appl. Cryst. 2 (1969) 164.
- (1969) J. Appl. Cryst. , vol.2 , pp. 164
- Mozzi, R.L.¹ Warren, B.E.²

12
- 0002161751
- H. F. Poulsen, J. Neuefeind, H.-B. Neumann, J. R. Schneider and M. D. Zeidler: J. Non-Cryst. Solids 188 (1995) 63.
- (1995) J. Non-cryst. Solids , vol.188 , pp. 63
- Poulsen, H.F.¹ Neuefeind, J.² Neumann, H.-B.³ Schneider, J.R.⁴ Zeidler, M.D.⁵

13
- 4143105892
- A. Moen, L. LeNoc, D. T. On, L. Bonneviot, L. Levesque and D. Roy: J. De Physique 7 (1997) C2-275.
- (1997) J. De Physique , vol.7
- Moen, A.¹ LeNoc, L.² On, D.T.³ Bonneviot, L.⁴ Levesque, L.⁵ Roy, D.⁶

14
- 0016093108
- M. G. Duffy, D. S. Boudreaux and D. E. Polk: J. Non-Cryst. Solids 15 (1974) 435.
- (1974) J. Non-cryst. Solids , vol.15 , pp. 435
- Duffy, M.G.¹ Boudreaux, D.S.² Polk, D.E.³

15
- 0542395209
- A. L. Ankudinov, B. Raval, J. J. Rehr and S. D. Conradson: Phys. Rev. B 58 (1998) 7565.
- (1998) Phys. Rev. B , vol.58 , pp. 7565
- Ankudinov, A.L.¹ Raval, B.² Rehr, J.J.³ Conradson, S.D.⁴

16
- 0003673335
- Wiley, New York
- D. Konigsberger and R. Prins: X-ray Absorption: Principles, Techniques and Applications of EXAFS and XANES (Wiley, New York, 1988).
- (1988) X-ray Absorption: Principles, Techniques and Applications of EXAFS and XANES
- Konigsberger, D.¹ Prins, R.²

17
- 0037554736
- G. Kloster, T. Scherban, G. Xu, J. Blaine, B. Sun and Y. Zhou: Proc. IITC (2002) p. 242.
- (2002) Proc. IITC , pp. 242
- Kloster, G.¹ Scherban, T.² Xu, G.³ Blaine, J.⁴ Sun, B.⁵ Zhou, Y.⁶

18
- 0004133516
- Gaussian, Inc., Pittsburgh PA
- GAUSSIAN98, Revision A.11, Gaussian, Inc., Pittsburgh PA, 2001.
- (2001) GAUSSIAN98, Revision A.11

19
- 0035293925
- J. J. Rehr and A. L. Ankudinov: J. Synchrotron Rad. 8 (2001) 61.
- (2001) J. Synchrotron Rad. , vol.8 , pp. 61
- Rehr, J.J.¹ Ankudinov, A.L.²

20
- 0035289871
- A. L. Ankudinov, A. I. Nesvizhskii and J. J. Rehr: J. Synchrotron Rad. 8 (2001) 92.
- (2001) J. Synchrotron Rad. , vol.8 , pp. 92
- Ankudinov, A.L.¹ Nesvizhskii, A.I.² Rehr, J.J.³

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