Thermal conductivity of ultra low-k dielectrics

Microelectronic Engineering

Volumn 70, Issue 2-4, 2003, Pages 280-284

  Delan, A ^a   Rennau, M ^a   Schulz, S E ^a   Gessner, T ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Low k dielectric; Thermal conductivity

Indexed keywords

COMPUTER SIMULATION; PERMITTIVITY; POROUS MATERIALS; SILICA; THERMAL CONDUCTIVITY;

THERMALLY GROWN MATERIALS;

DIELECTRIC FILMS;

EID: 0142075276     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00417-9     Document Type: Conference Paper

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