In2O3 films deposited by spray pyrolysis as a material for ozone gas sensors

Sensors and Actuators, B: Chemical

Volumn 99, Issue 2-3, 2004, Pages 297-303

  Korotcenkov, G ^a   Cerneavschi, A ^a   Brinzari, V ^a   Vasiliev, A ^a   Ivanov, M ^a   Cornet, A ^b   Morante, J ^b   Cabot, A ^b   Arbiol, J ^b  

^a TECHNICAL UNIVERSITY OF MOLDOVA   (Moldova)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Film structure; Gas response; In2O3; Ozone; Spray pyrolysis

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; GRAIN SIZE AND SHAPE; HIGH RESOLUTION ELECTRON MICROSCOPY; INDIUM COMPOUNDS; OZONE; POROSITY; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; TRANSMISSION ELECTRON MICROSCOPY;

FILM STRUCTURES; GAS RESPONSE; IN2O3; SPRAY PYROLYSIS;

CHEMICAL SENSORS;

EID: 2342584735     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2003.01.001     Document Type: Article

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