Modification of metal oxide semiconductor gas sensor by electrophoretic deposition

Sensors and Actuators, B: Chemical

Volumn 93, Issue 1-3, 2003, Pages 316-320

  Dougami, Naganori ^a   Takada, Tadashi ^a  

^a New Cosmos Electric Co Ltd   (Japan)

Author keywords

Coating layer; Electrophoretic deposition; Modification; Semiconductor gas sensor

Indexed keywords

COATINGS; ELECTROPHORESIS; MOS DEVICES; MULTILAYERS;

ELECTROPHORETIC DEPOSITION;

CHEMICAL SENSORS;

EID: 0038110879     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00219-3     Document Type: Conference Paper

References (3)

1. H. Kitaguchi, Japanese Patent 79-34640 (1979).
2. T. Takada, H. Shiozawa, H. Kobayashi, T. Tanjou, Y. Matsubara, Miniaturized hot wire type semiconductor gas sensor operated with a small battery, in: Proceedings of the 6th International Meeting on Chemical Sensors, Technical Digest, Gaithersburg, vol. 80, 1996.
3. T. Takada, H. Shiozawa, H. Kobayashi, T. Tanjou, A. Furukawa, Miniaturized hot wire type semiconductor gas sensor operated with a small battery, in: Proceedings of the Sensors'97, Messezentfrum Nurnberg, vol. B4.1, 1997, pp. 159-164.