Influence of the electron beam on electromigration measurements within a scanning electron microscope

Applied Physics Letters

Volumn 90, Issue 4, 2007, Pages

  Stahlmecke, B ^a   Dumpich, G ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMIGRATION; ELECTRON BEAM LITHOGRAPHY; GOLD; NANOSTRUCTURED MATERIALS; OSCILLATIONS; SCANNING ELECTRON MICROSCOPY;

CURRENT STRESSING; RESISTANCE OSCILLATIONS; THERMAL EVAPORATION; VOID MORPHOLOGY;

ELECTRON BEAMS;

EID: 33846561192     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2432304     Document Type: Article

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