The effect of annealing atmosphere on photoluminescent properties of SiCN films

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5404-5407

  Du, Xi Wen ^a   Fu, Yang ^a   Sun, Jing ^a   Yao, Pei ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Annealing; Photoluminescence; Silicon carbonitride; Sputtering

Indexed keywords

ANNEALING; PHOTOLUMINESCENCE; SPUTTERING; SYNTHESIS (CHEMICAL);

PROTECTIVE GAS; REACTIVE SPUTTERING; SILICON CARBONITRIDE;

SILICON COMPOUNDS;

ANNEALING; PHOTOLUMINESCENCE; SILICON COMPOUNDS; SPUTTERING; SYNTHESIS (CHEMICAL);

EID: 33846532235     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.046     Document Type: Article

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