Influence of oxygen desorption on in situ analysis of the surface composition during O2+ bombardment of Si

Surface Science

Volumn 601, Issue 3, 2007, Pages 763-771

  Janssens, T ^a   Vandervorst, W ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Oxygen bombardment; Oxygen desorption; Silicon; SIMS; Surface oxidation

Indexed keywords

DESORPTION; ION BOMBARDMENT; IONIZATION; OXIDATION; OXYGEN; SILICON;

OXYGEN BOMBARDMENT; OXYGEN DESORPTION; SITU ANALYSIS; SURFACE OXIDATION;

SURFACE STRUCTURE;

EID: 33846529128     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.11.004     Document Type: Article

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