Effects of oxygen flooding on sputtering and ionization processes during ion bombardment

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 452-459

  Tian, C ^a   Vandervorst, W ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001689713     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580873     Document Type: Article

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