Modeling of bombardment induced oxidation of silicon

Journal of Applied Physics

Volumn 89, Issue 5, 2001, Pages 3001-3011

  De Witte, H ^a,b   Vandervorst, W ^a   Gijbels, R ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000256118     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1344581     Document Type: Article

References (50)

1. J. L. Alay, Ph.D. thesis, University of Leuven, Belgium, 1993.
2. K. Wittmaack, in SIMS IX, edited by A. Benninghoven, Y. Nihei, R. Shimizu, and H. W. Werner (Wiley, Chichester, 1994), pp. 394-397.
3. W. De Coster, Ph.D. thesis, University of Leuven, Belgium, 1995.
4. C. P. Beyer, Ph.D. thesis, University of London, UK, 1994.
5. K. Wittmaack, Surf. Interface Anal. 24, 389 (1996).
6. K. Wittmaack, J. Vac. Sci. Technol. B 18, 1 (2000).
7. K. Wittmaack, Philos. Trans. R. Soc. London, Ser. A 354, 2731 (1996).
8. Y. Li, J. A. Kilner, A. K. Robinson, P. L. F. Hemment, and C. D. Marsh, J. Appl. Phys. 70, 3605 (1991).
9. O. Vancauwenberghe, N. Herbots, and O. C. Hellman, J. Vac. Sci. Technol. A 10, 713 (1992).
10. S. S. Todorov, I. R. Chakarov, and D. S. Karpuzov, Nucl. Instrum. Methods Phys. Res. B 65, 79 (1992).
11. H. U. Jäger, Nucl. Instrum. Methods Phys. Res. B 15, 748 (1986).
12. H. U. Jäger, Nucl. Instrum. Methods Phys. Res. B 65, 67 (1992).
13. S. N. Bunker and A. J. Armini, Nucl. Instrum. Methods Phys. Res. B 39, 7 (1989).
14. F. Schulz and K. Wittmaack, Radiat. Eff. 29, 31 (1976).
15. M. Wadsworth, D. G. Armour, R. Badheka, and R. Collins, Int. J. Numerical Modelling, Elect. Networks, Devices and Fields Networks 3, 157 (1990).
16. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985), Vol. 1.
17. W. Vandervorst, J. Alay, B. Brijs, W. De Coster, and K. Elst, Secondary Ion Mass Spectrometry SIMS IX, edited by A. Benninghoven et al. (Wiley, Chichester, 1994), pp. 599-608.
18. J. L. Alay, W. Vandervorst, and H. Bender, J. Appl. Phys. 77, 3010 (1995).
19. J. P. Biersack and L. Haggmark, Nucl. Instrum. Methods 174, 257 (1980).
20. http://www.research.ibm.com/ionbeams/home.htm#SRIM
21. J. P. Biersack and W. G. Eckstein, Appl. Phys. A: Solids Surf. 34, 73 (1984).
22. J. P. Biersack, Fusion Technol. 6, 475 (1984).
23. K. Wittmaack, Phys. Rev. B 56, R5701 (1997).
24. M. G. Dowsett, C. Jeynes, E. A. Clark, R. Webb, and S. M. Newstead, in Secondary Ion Mass Spectrometry SIM VII, edited by A. Benninghoven et al. (Wiley, Chichester, 1990), pp. 615-618.
25. N. S. Smith, Ph. D. thesis, University of Warwick, UK, 1996.
26. M. G. Dowsett, R. D. Barlow, and P. N. Allen, J. Vac. Sci. Technol. B 12, 186 (1994).
27. T. Hayashi, H. Okamoto, and Y. Homma, IOP Conf. Ser. 59, 533 (1981).
28. K. Wittmaack, in Practical Surface and Interface Analysis, 2nd ed., Ion and Neutral Spectroscopy, edited by Briggs and Seah (Wiley, Chichester, 1992), Vol. 2.
29. K. Wittmaack (private communication).
30. K. Wittmaack, Surf. Sci. 419, 249 (1999).
31. W. De Coster, B. Brijs, P. Osiceanu, J. Alay, M. Caymax, and W. Vandervorst, Nucl. Instrum. Methods Phys. Res. B 85, 911 (1994).
32. N. Menzel and K. Wittmaack, Nucl. Instrum. Methods Phys. Res. B 45, 219 (1990).
33. G. P. Beyer, S. B. Patel, and J. A. Kilner, Nucl. Instrum. Methods Phys. Res. B 85, 370 (1994).
34. P. Augustus, P. Kightley, J. L. Hutchinson, W. A. P. Nicholson, E. A. Clark, M. G. Dowsett, and G. P. Spiller, Inst. Phys. Conf. Ser. 100, 519 (1989).
35. B. G. Svensson, M. K. Linnarsson, B. Mohadjeri, M. Petravic, and J. S. Williams, Nucl. Instrum. Methods Phys. Res. B 85, 363 (1994).
36. M. G. Dowsett, Fresenius J. Anal. Chem. 341, 224 (1991).
37. K. Wittmaack, Secondary Ion Mass Spectrometry SIMS IX, edited by A. Benninghoven et al. (Wiley, Chichester, 1994).
38. J. L. Alay and W. Vandervorst, Phys. Rev. B 50, 15015 (1994).
39. W. Vandervorst, invited presentation on ISSIMS'98/SIMS II, China 1998 International Symposium on Secondary Ion Mass Spectrometry and Second Chinese National Conference on Secondary Ion Mass Spectrometry, December 1998, Vol. 18.
40. K. Wittmaack, Surf. Sci. 112, 168 (1981).
41. J. Bøttiger, J. A. Davies, P. Sigmund, and K. B. Winterborn, Radiat. Eff. 11, 69 (1971).
42. J. Deleu, B. Brijs, and W. Vandervorst, SIMS XII Abstract Book, Twelfth International Conference on Secondary Ion Mass Spectrometry and Related Topics, September 5-10, 1999, p. 138.
43. J. Deleu, B. Brijs, and W. Vandervorst, SIMS XII Abstract Book, Twelfth International Conference on Secondary Ion Mass Spectrometry and Related Topics, September 5-10, 1999, p. 5.
44. K. Wittmaack, M. Strigl, and A. Horwarth, Surf. Interf. Anal. 29, 717 (2000).
45. H. De Witte, W. Vandervorst, and R. Gijbels, Proceedings of SIMS XI Conference, edited by A. Benninghoven et al. (Wiley, Chichester, 1998), pp. 327-330.
46. H. De Witte, T. Conard, R. Gouttebaron, R. Magnée, R. Caudano, W. Vandervorst, and R. Gijbels, First European Workshop on Secondary Ion Mass Spectrometry, October 4-6, 1998, Munster, Germany, Book of Abstracts, p. 62.
47. C. Tian and W. Vandervorst, J. Vac. Sci. Technol. A 15, 452 (1997).
48. M. G. Dowsett, T. J. Ormsby, D. I. Elliner, and G. A. Cooke, SIMS XI Proceedings, edited by G. Gillen, R. Lareau, J. Bennett, and F. Stevie (Wiley, Chichester, 1998), p. 371.
49. J. Remmerie, W. Vandervorst, and H. E. Macs, Nucl. Instrum. Methods Phys. Res. B 13, 416 (1986).
50. W. Vandervorst, F. R. Shepherd, J. Newman, B. F. Philips, and J. Remmerie, J. Vac. Sci. Technol. A 3, 1359 (1985).