Broadband Mo/Si multilayer transmission phase retarders for the extreme ultraviolet

Applied Physics Letters

Volumn 90, Issue 3, 2007, Pages

  Wang, Zhanshan ^a   Wang, Hongchang ^a   Zhu, Jingtao ^a   Zhang, Zhong ^a   Xu, Yao ^a   Zhang, Shumin ^a   Wu, Wenjuan ^a   Wang, Fengli ^a   Wang, Bei ^a   Liu, Liqin ^a   Chen, Lingyan ^a   Michette, Alan G ^b   Pfauntsch, Slawka J ^b   Keith Powell, A ^b   Schäfers, Franz ^c   Gaupp, Andreas ^c   MacDonald, Mike ^d  

^a TONGJI UNIVERSITY   (China)

^b KING'S COLLEGE LONDON   (United Kingdom)

^c HAHN MEITNER INSTITUT   (Germany)

^d DARESBURY LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; MULTILAYERS; NUMERICAL METHODS; SILICON; SILICON NITRIDE; ULTRAVIOLET RADIATION;

BROADBAND PHASE RETARDERS; PHASE RETARDERS; SILICON NITRIDE MEMBRANES;

MOLYBDENUM;

EID: 33846417603     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2431761     Document Type: Article

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