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Volumn 99, Issue 5, 2006, Pages
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Broadband multilayer polarizers for the extreme ultraviolet
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
MOLYBDENUM;
MULTILAYERS;
OPTIMIZATION;
SILICON;
ULTRAVIOLET RADIATION;
BROADBAND MULTILAYER POLARIZERS;
EXTREME ULTRAVIOLET;
OPTIMIZATION ALGORITHM;
S-POLARIZED REFLECTIVITIES;
OPTICAL DEVICES;
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EID: 33645239878
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2179152 Document Type: Article |
Times cited : (36)
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References (16)
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