Broad angular multilayer analyzer for soft X-rays

Optics Express

Volumn 14, Issue 6, 2006, Pages 2533-2538

  Wang, Z S ^a   Wang, H C ^a   Zhu, J T ^a   Wang, F L ^a   Gu, Z X ^a   Chen, L Y ^a   Michette, A G ^b   Powell, A K ^b   Pfauntsch, S J ^b   Schafers F ^c  

^a TONGJI UNIVERSITY   (China)

^b KING'S COLLEGE LONDON   (United Kingdom)

^c HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; FABRICATION; MAGNETRON SPUTTERING; MOLYBDENUM; NUMERICAL ANALYSIS; OPTIMIZATION; POLARIZATION; SILICON;

BESSY; BROAD ANGULAR MULTILAYER ANALYZER; NON-PERIODIC MO/SI, MO/BE, AND NI/C BROAD ANGULAR MULTILAYER ANALYZERS; NUMERICAL OPTIMIZATION ALGORITHM; PLATEAU S-REFLECTIVITY; SOFT X-RAYS;

X RAYS;

EID: 33645082673     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.002533     Document Type: Article

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