Research of multilayers in EUV, soft X-ray and X-ray

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volumn 13, Issue 4, 2005, Pages 512-518

  Wang, Zhan Shan ^a   Wang, Feng Li ^a   Zhang, Zhong ^a   Wang, Hong Chang ^a   Wu, Wen Juan ^a   Zhang, Shu Min ^a   Xu, Yao ^a   Gu, Zhong Xiang ^a   Cheng, Xin Bin ^a   Li, Cun Xia ^a   Wu, Yong Rong ^a   Wang, Bei ^a   Qin, Shu Jin ^a   Chen, Ling Yan ^a  

^a TONGJI UNIVERSITY   (China)

Author keywords

Analyzer; Broadband; Multilayer; Supermirror

Indexed keywords

INTERFEROMETERS; MAGNETRON SPUTTERING; MIRRORS; OPTICAL BEAM SPLITTERS; SILICON NITRIDE; ULTRAVIOLET DEVICES; X RAY APPARATUS; X RAY LASERS;

BROADBAND ANALYZERS; EXTREME ULTRAVIOLET (EUV); SOFT X RAY LASER MICHELSON INTERFEROMETER; SUPERMIRROR;

OPTICAL MULTILAYERS;

EID: 25144443721     PISSN: 1004924X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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