Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

Journal of Electron Spectroscopy and Related Phenomena

Volumn 101-103, Issue , 1999, Pages 869-873

  Yamamoto, Masaki ^a   Nomura, Hiroshi ^a   Yanagihara, Mihiro ^a   Furudate, Minaji ^a   Watanabe, Makoto ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Ellipsometry; EUV transmission multilayers; Polarization; Synchrotron

Indexed keywords

EID: 0003623916     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0368-2048(98)00403-4     Document Type: Article

References (13)

1. A. Khandar, P. Dhez, Proc. SPIE 563 (1985) 158.
2. E.S. Gluskin et al., Nucl. Instrum. Methods A246 (1986) 394.
3. E. Spiller, in: Proc. IX-ICO, Santa Monica, CA, 581, 1972.
4. M. Yamamoto, Proc. SPIE 2010 (1993) 152.
5. J.B. Kortright, J.H. Underwood, Nucl. Instrum. Methods A291 (1990) 272.
6. J.B. Kortright et al., Appl. Phys. Lett. 60 (1992) 2963.
7. M. Yanagihara et al., Optical Rev. 3 (1996) 65.
8. M. Yamamoto, M. Furudate, Thin Solid Films 313-314 (1998) 751.
9. B.L. Henke, E.M. Gullikson, J.C. Davis, Atomic Data Nucl Data Tables 54 (1993) 181.
10. H. Nomura et al., Proc. SPIE 1720 (1992) 395.
11. W. Hu, M. Yamamoto, M. Watanabe, Proc. SPIE 2873 (1996) 74.
12. T. Maehara et al., Appl. Opt. 31 (1992) 1622.
13. M. Yamamoto et al., Rev. Sci. Instrum. 63 (1992) 1510.