Probing technique for microparts using optically trapped particle by annular beam

VDI Berichte

Volumn , Issue 1694, 2002, Pages 103-108

  Nishikawa, M ^a   Takaya, Y ^a   Takahashi, S ^a   Uekita, M ^a   Miyoshi, T ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ANNULAR BEAM; AXICON; IN AIR; LASER TRAPPING PROBE;

METHOD OF MOMENTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPACIFIERS; OPTICAL SENSORS; OSCILLATIONS; PROBES; SHRINKAGE; TECHNOLOGY;

NANOTECHNOLOGY;

EID: 4444323606     PISSN: 00835560     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (4)

1. K.Takamasu, et al. "Basic Concept of Nano-CMM",Proc. of The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering, pp. 155-158(1996)
2. Y.Takaya, S.Takahashi, T.Miyoshi, "Nano-Positional Detection Using Laser Trapping Probe For Microparts",Proc. of ASPE 2000 annual Meeting, pp. 584-587
3. A.Ashkin, J.M.Dziedzic, J.E.Bjorkholm and S.Chu, "Observation of a single-beam gradient force optical trap for dielectric particles", Opt. Lett., 11,pp.288-290(1986)
4. Z.Ding, G. Lai, T. Sakakibara and S.Shinohara, "Determination of spring constant of optical trap by external excitation and lock-in detection", J. Appl. Phys., 88, pp737-741