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Plasma Sources Science and Technology

Volumn 10, Issue 4, 2001, Pages 541-546

Observation of a plasma-sheath resonance in a parallel-plate low-pressure rf discharge

(2) Orlov, K E a Smirnov, A S a

a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRON ENERGY LEVELS; ELECTRON SPECTROSCOPY; HARMONIC ANALYSIS; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA SHEATHS;

PLASMA-SHEATH RESONANCE; RADIO FREQUENCY DISCHARGES;

RESONANCE;

EID: 0035507036 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/10/4/301 Document Type: Article

Times cited : (4)

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