Micro-sized spectrometer based on a lamellar grating interferometer

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 175-176

  Manzardo, O ^a   Michaely, R ^a   Schadelin F ^a   Herzig, H P ^a   Noell, Wilfried ^a   Overstolz, Thomas ^a   De Rooij, Nico ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Electrostatic actuators; Electrostatic measurements; Fourier transforms; Gratings; Optical interferometry; Phase measurement; Silicon on insulator technology; Spectroscopy; Wavelength measurement; Xenon

Indexed keywords

ACTUATORS; ARC LAMPS; DIFFRACTION GRATINGS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; INTERFEROMETERS; INTERFEROMETRY; MICROMACHINING; MOEMS; PHASE MEASUREMENT; SILICON; SPACECRAFT INSTRUMENTS; SPECTROMETERS; SPECTROSCOPY; XENON;

ELECTROSTATIC COMB DRIVES; ELECTROSTATIC MEASUREMENTS; FOURIER TRANSFORM SPECTROMETERS; LAMELLAR GRATINGS; OPTICAL INTERFEROMETRY; OPTICAL PATH DIFFERENCE; PHASE CORRECTIONS; WAVELENGTH MEASUREMENT;

SILICON ON INSULATOR TECHNOLOGY;

EID: 33846115611     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233522     Document Type: Conference Paper

References (3)

1. J. D. Strong, and G. A. Vanasse. Lamellar grating far-infrared interferometer. J. Opt. Soc. Am., 50, 113-118 (1960).
2. W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. Marxer, K. Weible, R. Dändliker, and N. De Rooij. Applications of SOI-based optical MEMS. IEEE J. Selec. Top. Quant. Electr., 8, 148-154 (2002).
3. O. Manzardo, H. P. Herzig, C. R. Marxer, N. F. de Rooij. Miniaturized time-scanning Fourier transform spectrometer based on silicon technology. Opt. Lett., 24, 1705-1707 (1999).