Application of a micromachined translatory actuator to an optical FTIR spectrometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6186, Issue , 2006, Pages

  Kenda, Andreas ^a   Drabe, Christian ^b   Schenk, Harald ^b   Frank, Albert ^a   Lenzhofer, Martin ^a   Scherf, Werner ^a  

^a CTR CARINTHIAN TECH RESEARCH AG   (Austria)

^b FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

FTIR spectrometer; Infrared spectrometry; Michelson interferometer; MOEMS; Translatory micro mirror

Indexed keywords

ACTUATORS; ALGORITHMS; CMOS INTEGRATED CIRCUITS; DATA PROCESSING; DIGITAL SIGNAL PROCESSING; ELECTRODES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MIRRORS; NATURAL FREQUENCIES; PROCESS CONTROL; SILICON ON INSULATOR TECHNOLOGY;

FTIR SPECTROMETER; INFRARED SPECTROMETRY; MICHELSON INTERFEROMETER; MICRO-OPTO-ELECTRO-MECHANICAL SYSTEM (MOEMS); TRANSLATORY MICRO MIRROR;

SPECTROMETERS;

EID: 33746727716     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.662008     Document Type: Conference Paper

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