Optical MEMS for advanced spectrometers

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Volumn , Issue , 2005, Pages 117-118

  Schenk, Harald ^a   Grüger, Heinrich ^a   Zimmer, Fabian ^a   Scherf, Werner ^a   Kenda, Andreas ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; FOURIER TRANSFORMS; OPTICAL DEVICES; SPECTROMETERS;

FOURIER TRANSFORM SPECTROMETERS; HIGH FREQUENCY SCANNING GRATINGS; OPTICAL MEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33644612232     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2005.1540106     Document Type: Conference Paper

References (3)

1. A. Wolter, S. Hsu, H. Schenk, H. Lakner "Applications and requirements for MEMS scanner mirrors", Proc. SPIE vol. 5719, pp. 64-75 (2005).
2. Ch. Drabe, A. Wolter, H. Schenk, H. Lakner, "Accelerometer by Means of 9 Resonant Micro Actuator", SPIE Vol. 5344, p. 124-133. (2004).
3. H. Schenk, P, Dürr, U. Dauderstädt, A. Gehner, A. Wolter, H. Lakner, "Photonic Microsystems: An enabling technology for light deflection and modulation", SPIE Vol. 5348, p. 7-21. (2004).