A MEMS based visible-NIR Fourier transform microspectrometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6186, Issue , 2006, Pages

  Ataman, C ^a   Urey, H ^a   Isikman, S O ^a   Wolter, A ^b  

^a KOÇ UNIVERSITY   (Turkey)

^b FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

Comb actuation; Diffraction grating; Fourier transform spectroscopy; MEMS

Indexed keywords

ACTUATORS; DIFFRACTION GRATINGS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; PHOTODETECTORS;

COMB ACTUATION; DIFFRACTION PATTERN; FOURIER TRANSFORM MICROSPECTROMETER (FTS); OPTICAL PATH DIFFERENCE;

SPECTROMETERS;

EID: 33746663604     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.664781     Document Type: Conference Paper

References (7)

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