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Materials Science and Engineering: B

Volumn 136, Issue 2-3, 2007, Pages 203-206

Improvement in fatigue property for a PZT ferroelectric film device with SRO electrode film prepared by chemical solution deposition

(3) Miyazaki, H a Miwa, Y b Suzuki, H b

a SHIMANE UNIVERSITY (Japan)

b SHIZUOKA UNIVERSITY (Japan)

Author keywords

Chemical solution deposition; Fatigue property; PZT; SRO

Indexed keywords

ELECTRODES; FATIGUE OF MATERIALS; LEAD COMPOUNDS; PIEZOELECTRICITY; SILICA; SPIN COATING;

CHEMICAL SOLUTION DEPOSITION (CSD); FATIGUE PROPERTY; REMNANT POLARIZATION; SRO ELECTRODE FILM;

FERROELECTRIC THIN FILMS;

EID: 33845938083 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/j.mseb.2006.09.024 Document Type: Article

Times cited : (16)

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