Chemical solution deposition of conductive SrRuO3 thin film on Si substrate

Ceramics International

Volumn 30, Issue 7, 2004, Pages 1357-1360

  Suzuki, Hisao ^a   Miwa, Yuki ^a   Miyazaki, Hidetoshi ^b   Takahashi, Minoru ^c   Ota, Toshitaka ^c  

^a SHIZUOKA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Chemical solution deposition; D. Perovskite; Oxide electrode; SrRuO3; Thin film

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRODES; PEROVSKITE; SILICON; SUBSTRATES; THIN FILMS;

CHEMICAL SOLUTION DEPOSITION; OXIDE ELECTRODES; SRRUO3;

STRONTIUM COMPOUNDS;

EID: 4344641778     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2003.12.107     Document Type: Conference Paper

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