Extreme ultraviolet broadband Mo/Y multilayer analyzers

Applied Physics Letters

Volumn 89, Issue 24, 2006, Pages

  Wang, Zhanshan ^a   Wang, Hongchang ^a   Zhu, Jingtao ^a   Xu, Yao ^a   Zhang, Shumin ^a   Li, Cunxia ^a   Wang, Fengli ^a   Zhang, Zhong ^a   Wu, Yongrong ^a   Cheng, Xinbin ^a   Chen, Lingyan ^a   Michette, Alan G ^b   Pfauntsch, Slawka J ^b   Powell, A Keith ^b   Schäfers, Franz ^c   Gaupp, Andreas ^c   MacDonald, Mike ^d  

^a TONGJI UNIVERSITY   (China)

^b KING'S COLLEGE LONDON   (United Kingdom)

^c HAHN MEITNER INSTITUT   (Germany)

^d DARESBURY LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT POLARIZATION; LIGHT REFLECTION; MAGNETRON SPUTTERING; MULTILAYERS; POLARIMETERS; ULTRAVIOLET DEVICES;

MULTILAYER ANALYZERS; POLARIZATION DEGREE; X-RAY POLARIMETERS;

SPECTRUM ANALYZERS;

EID: 33845775806     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2405874     Document Type: Article

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