Broadband Mo/Si multilayer analyzers for the 15-17 nm wavelength range

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 2523-2526

  Wang, Hongchang ^a   Zhu, Jingtao ^a   Wang, Zhanshan ^a   Zhang, Zhong ^a   Zhang, Shumin ^a   Wu, Wenjuan ^a   Chen, Lingyan ^a   Michette, Alan G ^b   Powell, A Keith ^b   Pfauntsch, Sławka J ^b   Schäfers, Franz ^c   Gaupp, Andreas ^c  

^a TONGJI UNIVERSITY   (China)

^b KING'S COLLEGE LONDON   (United Kingdom)

^c HAHN MEITNER INSTITUT   (Germany)

Author keywords

Extreme ultraviolet; Multilayers; Polarization

Indexed keywords

MAGNETRON SPUTTERING; POLARIMETERS; POLARIZATION;

GRAZING INCIDENCE ANGLE; SOFT X-RAY POLARIMETER; ULTRAVIOLET POLARIZATION;

MULTILAYERS;

EID: 33750797526     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.04.039     Document Type: Article

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