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Volumn 601, Issue 1, 2007, Pages 76-86

CF interaction with Si(1 0 0)-(2 × 1): Molecular dynamics simulation

Author keywords

Adsorption; Computer simulations; Ion solid interactions; Molecular dynamics; Surface chemical reaction

Indexed keywords

ADSORPTION; CHEMICAL BONDS; COMPUTER SIMULATION; DISSOCIATION; MOLECULAR DYNAMICS; SILICON CARBIDE; SURFACE REACTIONS;

EID: 33845723537     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.09.016     Document Type: Article
Times cited : (7)

References (35)
  • 8
    • 0025904046 scopus 로고    scopus 로고
    • J.M. Webb, Z.H. Amini, Characteristics of gate oxide surface material after exposure to magnetron-enhanced reactive ion etching plasma, Santa Clara, CA, USA, SPIE, 1991, p. 47.
  • 13
    • 33845804990 scopus 로고    scopus 로고
    • L. Hanley, D.G. Schultz, E.T. Ada, Surface modification by molecular ions, AIP, 1999, p. 757.
  • 35
    • 33845780339 scopus 로고    scopus 로고
    • F. Gou, M.A. Gleeson, A.W. Kleyn, accepted for publication in PCCP.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.