Improved interatomic potentials for silicon-fluorine and silicon-chlorine

Journal of Chemical Physics

Volumn 120, Issue 5, 2004, Pages 2405-2412

  Humbird, David ^a   Graves, David B ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIMERS; IONIZATION; KINETIC ENERGY; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; POTENTIAL ENERGY; PROBABILITY; PROBABILITY DENSITY FUNCTION;

INTERATOMIC POTENTIALS; PLASMA-SURFACE INTERACTIONS;

SILICON COMPOUNDS;

EID: 1442306211     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1636722     Document Type: Article

References (36)

1. H. F. Winters and J. W. Coburn, Surf. Sci. Rep. 14, 161 (1992), and references therein.
2. C. F. Abrams and D. B. Graves, Thin Solid Films 374, 150 (2000).
3. T. A. Schoolcraft, in 23rd International Symposium on Dry Processes Conference Proceedings (The Institute of Electrical Engineers of Japan, Tokyo, Japan, 2001), pp. 29-36, and references therein.
4. F. H. Stillinger and T. A. Weber, Phys. Rev. B 31, 5262 (1985).
5. F. H. Stillinger and T. A. Weber, J. Chem. Phys. 88, 5123 (1988).
6. F. H. Stillinger and T. A. Weber, Phys. Rev. Lett. 62, 2144 (1989).
7. T. A. Schoolcraft and B. J. Garrison, J. Vac. Sci. Technol. A 8, 3496 (1990).
8. T. A. Schoolcraft and B. J. Garrison, J. Am. Chem. Soc. 113, 8221 (1991).
9. T. A. Schoolcraft, A. M. Diehl, A. B. Steel, and B. J. Garrison, J. Vac. Sci. Technol. A 13, 1861 (1995).
10. P. C. Weakliem, C. J. Wu, and E. A. Carter, Phys. Rev. Lett. 69, 200 (1992).
11. P. C. Weakliem, C. J. Wu, and E. A. Carter, Phys. Rev. Lett. 69, 1475 (1992).
12. L. E. Carter, S. Khodabandeh, P. C. Weakliem, and E. A. Carter, J. Chem. Phys. 100, 2277 (1994).
13. L. E. Carter and E. A. Carter, J. Vac. Sci. Technol. A 12, 2235 (1994).
14. L. E. Carter and E. A. Carter, Surf. Sci. 323, 39 (1995).
15. L. E. Carter and E. A. Carter, J. Phys. Chem. 100, 873 (1996).
16. L. E. Carter and E. A. Carter, Surf. Sci. 360, 200 (1996).
17. A. Galijatovic, A. Darcy, B. Acree, G. Fullbright, R. McCormac, B. Green, K. D. Krantzman, and T. A. Schoolcraft, J. Phys. Chem. 100, 9471 (1996).
18. D. B. Graves and M. J. Kushner, J. Vac. Sci. Technol. A (to be published), and references therein.
19. J. Tersoff, Phys. Rev. B 38, 9902 (1988).
20. D. W. Brenner, Phys. Rev. B 42, 9458 (1990).
21. S. P. Walch, Surf. Sci. 496, 271 (2002).
22. C. F. Abrams and D. B. Graves, J. Appl. Phys. 86, 5938 (1999).
23. M. V. R. Murty and H. A. Atwater, Phys. Rev. B 51, 4889 (1995).
24. D. W. Brenner, O. A. Shenderova, J. A. Harrison, S. J. Stuart, B. Ni, and S. B. Sinnott, J. Phys.: Condens. Matter 14, 783 (2000).
25. H. F. Winters, private communication.
26. Numerical Recipes in C: The Art of Scientific Computing, edited by W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, 2nd ed. (Cambridge University Press, New York, 1992), p. 423.
27. C. F. Abrams, Ph.D. thesis, University of California, Berkeley (2000).
28. A. Ricca and C. W. Bauschlicher, Jr., J. Phys. Chem. A 102, 876 (1998).
29. H. Feil, J. Dieleman, and B. J. Garrison, J. Appl. Phys. 74, 1303 (1993).
30. D. E. Hanson, J. D. Kress, and A. F. Voter, J. Chem. Phys. 110, 5983 (1998).
31. J. Tanaka, C. F. Abrams, and D. B. Graves, J. Vac. Sci. Technol. A18, 938 (2000).
32. M. E. Barone and D. B. Graves, J. Appl. Phys. 77, 1263 (1995).
33. D. Humbird and D. B. Graves (in preparation).
34. A. Szabó, P. D. Farrall, and T. Engel, Surf. Sci. 312, 284 (1994).
35. A. Szabó and T. Engel, J. Vac. Sci. Technol. A 12, 648 (1994).
36. CRC Handbook of Chemistry and Physics, 74th ed. (CRC, Boca Raton, 1993), pp. 9-22, 9-126, 9-146.