A new time-of-flight instrument capable of in situ and real-time studies of plasma-treated surfaces

Vacuum

Volumn 81, Issue 2, 2006, Pages 196-201

  Gou, F ^a   Gleeson, M A ^b   Villette, J ^a   Kleyn, A W ^a,b  

^a LEIDEN UNIVERSITY   (Netherlands)

^b FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

Author keywords

Ion scattering from surfaces; Surface characterization by particle surface scattering; Vacuum apparatus

Indexed keywords

ION BEAMS; PLASMAS; REAL TIME SYSTEMS; SCATTERING; SENSORS; SURFACE PHENOMENA; VACUUM APPLICATIONS;

ION SCATTERING FROM SURFACES; SURFACE CHARACTERIZATION BY PARTICLE-SURFACE SCATTERING; TIME-OF-FLIGHT (TOF) INSTRUMENTS; VACUUM APPARATUS;

OPTICAL INSTRUMENTS;

EID: 33748176997     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.03.014     Document Type: Article

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