Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology

Nano Letters

Volumn 4, Issue 1, 2004, Pages 123-127

  Tseng, Yu Chih ^a   Xuan, Peiqi ^a   Javey, Ali ^b   Malloy, Ryan ^a   Wang, Qian ^b   Bokor, Jeffrey ^a   Dai, Hongjie ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBE; METAL OXIDE; SILICON;

ARTICLE; CATALYST; DEVICE; NANOTECHNOLOGY; SEMICONDUCTOR; SENSOR; VAPOR;

EID: 0842287323     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl0349707     Document Type: Article

References (19)

1. Treacy, M. M. J.; Ebbesen, T. W.; Gibson, J. M. Nature 1996, 381, 678.
2. Carbon nanotubes: synthesis, structure, properties, and applications; Dresselhaus, M. S., Dresselhaus, G., Avouris, Ph., Eds.; Springer: Berlin, 2001.
3. Dai, H.; Kong, J.; Zhou, C.; Franklin, N.; Tombler, T.; Cassell, A.; Fan, S.; Chapline, M. J. Phys. Chem. B 1999, 103, 11246.
4. Avouris, Ph. Chem. Phys. 2002, 281, 429.
5. Javey, A.; Guo, J.; Wang, Q.; Lundstrom, M.; Dai, H. Nature 2003, 424, 654.
6. Javey, A.; Kim, H.; Brink, M.; Wang, Q.; Ural, A.; Guo, J.; McIntyre, P. ; McEuen, P.; Lundstrom, M.; Dai, H. Nature Mater. 2002, 1, 241.
7. McEuen P.; Fuhrer, M. S.; Park H. IEEE Trans. Nanotechnol. 2002, 1, 78.
8. Derycke, V.; Martel, R.; Appenzeller, J.; Avouris, Ph. Nano Lett. 2001, 1, 453.
9. Javey, A.; Wang, Q.; Ural, A.; Li, Y.; Dai, H. Nano Lett. 2002, 2, 929.
10. Luyken, R. J.; Hofmann, F. Nanotechnology 2003, 14, 273.
11. Kong, J.; Yenilmez, E.; Tombler, T. W.; Kim, W.; Dai, H.; Laughlin, R. B.; Liu, L.; Jayanthi, C. S.; Wu, S. Y. Phys. Rev. Lett. 2001, 87, 106801-1.
12. Kong, J.; Soh, H. T.; Cassell, A. M.; Quate, C. F.; Dai, H. Nature 1998, 395, 878.
13. Kong, J.; Cassell, A. M.; Dai, H. Chem. Phys. Lett. 1998, 292, 567.
14. Baker, R. J.; Li, H. W.; Boyce, D. E. CMOS Circuit Design, Layout, and Simulation; IEEE Press: New York, 1998.
15. CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory, URL http://www-microlab.eecs.berkeley.edu/baseline/ index.html.
16. Cassell, A. M.; Raymakers, J. A.; Kong, J.; Dai, H. J. Phys. Chem. B 1999, 103, 6484.
17. Franklin, N. R.; Wang, Q.; Tombler, T. W.; Javey, A.; Shim, M.; Dai, H. Appl. Phys. Lett. 2002, 81, 913.
18. Martel, R.; Derycke, V.; Lavoie, C.; Appenzeller, J.; Chan, K. K.; Tersoff, J.; Avouris, Ph. Phys. Rev. Lett. 2001, 87, 256805-1.
19. Qi, P.; Vermesh, O.; Grecu, M.; Javey, A.; Wang, Q.; Dai, H.; Peng, S.; Cho, K. J. Nano Lett. 2003, 3, 347.