Development of CMOS-compatible integrated silicon photonics devices

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 12, Issue 6, 2006, Pages 1688-1697

  Izhaky, Nahum ^a,b   Morse, Michael T ^a,c   Koehl, Sean ^c   Cohen, Oded ^b   Rubin, Doron ^b   Barkai, Assia ^b   Sarid, Gadi ^b   Cohen, Rami ^b   Paniccia, Mario J ^a,c  

^a IEEE   (Israel)

^b INTEL CORPORATION   (Israel)

^c INTEL CORPORATION   (United States)

Author keywords

Complementary metal oxide semiconductor (CMOS); Fabrication; Integrated; Manufacturing; Optoelectronics; Photonics; Silicon

Indexed keywords

OPTOELECTRONIC INTEGRATION; SILICON MODULATORS; SILICON OPTICAL BENCH (SIOB) TECHNOLOGY;

CMOS INTEGRATED CIRCUITS; FABRICATION; MANUFACTURE; OPTICAL WAVEGUIDES; PHOTONS; SILICON;

INTEGRATED OPTOELECTRONICS;

EID: 33845658606     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2006.884089     Document Type: Article

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