Blazed grating couplers in unibond SOI

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3896, Issue , 1999, Pages 360-368

  Ang, T W ^a   Reed, G T ^a   Vonsovici, A ^a   Evans, A G R ^a   Routley, P R ^a   Josey, M R ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; FABRICATION; INTEGRATED OPTOELECTRONICS; LIGHT MODULATION; MILLING (MACHINING); PERTURBATION TECHNIQUES; SEMICONDUCTING FILMS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

BLAZED GRATINGS; GRATING COUPLERS; ION BEAM MILLING; SILICON ON INSULATORS; UNIBOND;

WAVEGUIDE COUPLERS;

EID: 0033315174     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.370333     Document Type: Conference Paper

References (20)