Integration of SiON gratings with SOI

2005 IEEE International Conference on Group IV Photonics

Volumn 2005, Issue , 2005, Pages 192-194

  Jones, Richard ^a   Cohen, Oded ^b   Chan, Henry ^a   Rubin, Doron ^b   Fang, Alex ^a   Paniccia, Mario ^a  

^a INTEL CORPORATION   (United States)

^b INTEL CORPORATION   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED OPTICS; OPTICAL WAVEGUIDES; SILICON COMPOUNDS; SILICON ON INSULATOR TECHNOLOGY;

INTEGRATING SILICON OXYNITRIDE (SION); SION GRATINGS; THERMAL ADVANTAGES;

DIFFRACTION GRATINGS;

EID: 33746853876     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/GROUP4.2005.1516449     Document Type: Conference Paper

References (2)

1. G.-L. Bona, R. Germann and B. J. Offrein, "SiON high-refractive-index waveguide and planar lightwave circuits' IBM J. Res. & Dev. 47 (28) 239-249 (2003)
2. Liao, Ansheng Liu, Song Pang and Mario Paniccia, "Tunable Bragg grating filters in SOI waveguide" OSA Integrated Photonics Research, San Francisco, CA, USA (2004).