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Volumn 3, Issue 1, 2007, Pages 108-116

Patterning micron-sized features in a cross-linked poly(acrylic acid) film by a wet etching process

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EID: 33845547405     PISSN: 1744683X     EISSN: 17446848     Source Type: Journal    
DOI: 10.1039/b611630b     Document Type: Article
Times cited : (20)

References (41)
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    • 0023591036 scopus 로고
    • R. Roy Science 1987 238 1664
    • (1987) Science , vol.238 , pp. 1664
    • Roy, R.1
  • 34
    • 0003421978 scopus 로고
    • A. E. Martell and R. M. Smith, Plenum, New York
    • Critical Stability Constants, ed., A. E. Martell and R. M. Smith,, Plenum, New York, 1974
    • (1974) Critical Stability Constants, Ed.
  • 37
    • 33845547755 scopus 로고    scopus 로고
    • One parameter that appeared to have no effect on the relative rates of etching or the quality of the resulting structures was the temperature of the etching bath. We tried both cooling the bath (to ∼2°C) and heating the bath (to ∼28°C) to improve the resolution of this technique, but the quality of the pattern did not change
    • One parameter that appeared to have no effect on the relative rates of etching or the quality of the resulting structures was the temperature of the etching bath. We tried both cooling the bath (to ∼2°C) and heating the bath (to ∼28°C) to improve the resolution of this technique, but the quality of the pattern did not change
  • 41
    • 0003998388 scopus 로고    scopus 로고
    • L. I. Berger, CRC Press LLC, Boca Raton, FL, 85th edn
    • CRC Handbook of Chemistry and Physics, ed., L. I. Berger,, CRC Press LLC, Boca Raton, FL, 85th edn, 2000
    • (2000) CRC Handbook of Chemistry and Physics, Ed.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.