Patterning layered polymeric multilayer films by room-temperature nanoimprint lithography

Macromolecular Rapid Communications

Volumn 27, Issue 7, 2006, Pages 505-510

  Lu, Yingxi ^a   Hu, Wei ^a   Ma, Ying ^a   Zhang, Lianbin ^a   Sun, Junqi ^a   Lu, Nan ^a   Shen, Jiacong ^a  

^a Jilin University   (China)

Author keywords

Layer by layer assembly; Lithography; Multilayer films; Nanoimprint lithography; Pattern; Polyelectrolytes

Indexed keywords

ASSEMBLY; COMPRESSIBILITY; LITHOGRAPHY; PLASTIC FILMS; POLYELECTROLYTES; SODIUM COMPOUNDS;

LAYER-BY-LAYER ASSEMBLY; MULTILAYER FILMS; NANOIMPRINT LITHOGRAPHY; PATTERN;

MULTILAYERS;

EID: 33645781108     PISSN: 10221336     EISSN: 15213927     Source Type: Journal    
DOI: 10.1002/marc.200500834     Document Type: Article

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