Structural dynamics of an RF MEMS switch

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 71-75

  Sumali, Hartono ^a   Kuppers, Jaron D ^a   Czaplewski, David A ^a   Massad, Jordan E ^a   Dyck, Christopher W ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DOUBLE-CANTILEVER SPRINGS; ELECTROSTATIC ACTUATION; RADIO-FREQUENCY MICRO-ELECTROMECHANICAL SYSTEM; SOLID DYNAMICS;

ELECTROSTATICS; FINITE ELEMENT METHOD; MICROSCOPES; SOLID STATE PHYSICS; VELOCIMETERS; VELOCITY MEASUREMENT; VOLTAGE CONTROL;

ELECTROMECHANICAL DEVICES;

EID: 33645998704     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-80956     Document Type: Conference Paper

References (8)

1. Yao, J.J., 2000, "RF MEMS from a device perspective," J. Micromech. Microeng., vol. 10, p R9-R38.
2. Rebeiz, G.M., 2003, RF MEMS Theory, Design, and Technology, John Wiley & Sons.
3. Dyck, C.W., Plut, T.A, Nordquist, C.D., Finnegan, P.S., Austin, F., Reines, I, and Goldsmith, C., 2004, "Fabrication and Characterization of Ohmic Contacting RF MEMS Switches", SPIE Conference on Micromachining and Microfabrication, vol. 5344, p 79-88.
4. Eaton, W., Smith, N., Irwin, L. and Tanner, D., 1998, "Characterization techniques for surface-micromachined devices," Proc. SPIE, vol. 3514, p 431-438.
5. Schnitzer, R., Ruemmler, N., Grosser, V. and Michel, B., 1999, "Vibration Measurement of Microstructures by means of Laseroptical Modal Analysis," Proc. SPIE, vol. 3825, p 72-79.
6. Ozdoganlar, O. B., Hansche, B. D., Carne, T. G., 2003, "Experimental Modal Analysis for Microsystems," Proc. International Modal Analysis Conf.
7. LaVigne, G. F. and Miller, S. L., 1998, "A performance analysis system for MEMS using Automated Imaging Methods," Proc. IEEE International Testing Conference, Washington, D. C., p 442-447.
8. Massad, I.E., Sumali, H., Epp, D.S., and Dyck, C.W., 2005, "Modeling, simulation, and testing of the mechanical dynamics of an RF MEMS switch," Proc. Internat. Conf. MEMS NANO Smart Syst. ICMENS, pp. 237-240, July 24-7, Banff, Alberta, Canada.