Experimental investigation of dynamic response of RF-MEMS switches

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2004, Pages 397-401

  Ozdoganlar, O Burak ^a   Epp, David S ^b   Dyck, Christopher W ^b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; DAMPING; DYNAMIC RESPONSE; ELECTRIC CONTACTS; HOLOGRAPHIC INTERFEROMETRY; IMAGE SEGMENTATION; LASER DOPPLER VELOCIMETERS; NATURAL FREQUENCIES; SWITCHES;

MODE SHAPES; RADIO FREQUENCY (RF); SWITCH GEOMETRIES; TUNABLE FILTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 21644458049     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-61009     Document Type: Conference Paper

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