Development of a micro hot embossing process for fabricating micro optical devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4936, Issue , 2002, Pages 67-75

  Shan, X C ^a,b   Maeda, R ^a   Murakoshi, Y ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Cantilever; Hot embossing and Polycarbonate (PC); Mirror; Optical switch

Indexed keywords

MIRRORS; OPTICAL DEVICES; OPTICAL SWITCHES; OPTIMIZATION; POLYCARBONATES;

HOT EMBOSSING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0038079334     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.469430     Document Type: Conference Paper

References (7)

1. J. A. Walker: MSTnews on microsystems and MEMS; vol. 3, 2000, pp.6-9
2. R. Sawada, J. Yamaguchi, E. Higurashi and A. Shimizu: Proc. of IEEE/LEOS Optical MEMS'2002, Lugano, Switzerland, pp.11-12
3. C, Marxer, P. Griss and N.F. de Rooij: IEEE Photonics Technology Letters, Vol. 11, No.2, 1999, pp.233-235
4. Y. Hashiura, R. Maeda and T. Ikehara: Proc. of SPIE, 2001, Adelaide, Australia, pp.414-417
5. X.C. Shan, R. Maeda: Proc. of IEEE/LEOS Optical MEMS'2002, Lugano, Switzerland, pp.21-22
6. http://www.engineeringsystem.co.jp/
7. http://www.psrc.usm.edu/macrog/pc.htm