Wet etching of glass

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2005, Pages 35-44

  Iliescu, Ciprian ^a   Tay, Francis E H ^a,b  

^a INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Glass; Masking layers; Wet etching

Indexed keywords

MASKING LAYERS; MICROFLUIDIC DEVICES; PYREX GLASS WAFERS; WET ETCHING;

COMPOSITION; ETCHING; FLUIDIC DEVICES; MASKS; PHOTORESISTORS; SURFACE PROPERTIES;

SEMICONDUCTING GLASS;

EID: 33751526295     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2005.1558704     Document Type: Conference Paper

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