Performance evaluation of serial photolithography clusters: Queueing models, throughput and workload sequencing

ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

Volumn 2006, Issue , 2006, Pages 44-49

  Morrison, James R ^a   Bortnick, Beverly ^b   Martin, Donald P ^b  

^a CENTRAL MICHIGAN UNIVERSITY   (United States)

^b IBM   (United States)

Author keywords

Cluster tools; Cycle time; Photolithography performance evaluation; Queueing models; Throughput; Workload sequencing

Indexed keywords

LIFE CYCLE; MATHEMATICAL MODELS; QUEUEING NETWORKS; SERVERS; SILICON WAFERS; THROUGHPUT;

CLUSTER TOOLS; CYCLE TIME; PHOTOLITHOGRAPHY PERFORMANCE EVALUATION; QUEUEING MODELS; SERIAL PHOTOLITHOGRAPHY CLUSTERS; WORKLOAD SEQUENCING;

PHOTOLITHOGRAPHY;

EID: 33751403358     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.2006.1638722     Document Type: Conference Paper

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