An evaluation of deadlock-handling strategies in semiconductor cluster tools

IEEE Transactions on Semiconductor Manufacturing

Volumn 18, Issue 1, 2005, Pages 197-201

  Venkatesh, Srilakshmi ^a   Smith, Jeffrey S ^b  

^a HEWLETT PACKARD COMPANY   (United States)

^b AUBURN UNIVERSITY   (United States)

Author keywords

Cluster tool design; Deadlock detection and resolution; Deadlock handling; Deadlock prevention; Flexible manufacturing systems; Real time control of cluster tools

Indexed keywords

CONTROL THEORY; FLEXIBLE MANUFACTURING SYSTEMS; GRAPH THEORY; PRODUCT DESIGN; REAL TIME SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE;

CLUSTER TOOL DESIGN; DEADLOCK DETECTION AND RESOLUTION; DEADLOCK HANDLING; DEADLOCK PREVENTION; REAL TIME CONTROL OF CLUSTER TOOLS;

SEMICONDUCTOR DEVICE TESTING;

EID: 13844267598     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2004.836658     Document Type: Article

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