Application of cluster tool modeling to a 300 mm fab simulation

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2003, Pages 1394-1397

  Shikalgar, Sameer T ^a   Fronckowiak, David ^a   MacNair, Edward A ^b  

^a IBM MICROELECTRONICS   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; BATCH DATA PROCESSING; COMPUTER SIMULATION; DATA ACQUISITION; MATHEMATICAL MODELS; PARALLEL PROCESSING SYSTEMS; PRODUCTION CONTROL; STRATEGIC PLANNING; THROUGHPUT; WSI CIRCUITS;

CLUSTER TOOLS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 1642477908     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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