Deposition of diamond-like carbon films on aluminium substrates by RF-PECVD technique: Influence of process parameters

Diamond and Related Materials

Volumn 16, Issue 1, 2007, Pages 90-97

  Ravi, N ^a   Bukhovets, V L ^b   Varshavskaya, I G ^b   Sundararajan, G ^a  

^a INTERNATIONAL ADVANCED RESEARCH CENTRE FOR POWDER METALLURGY AND NEW MATERIALS ARCI   (India)

^b RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

Aluminium; Deposition; Diamond like carbon; Mechanical properties; RF PECVD

Indexed keywords

ALUMINUM ALLOYS; DEPOSITION; ELASTIC MODULI; MATHEMATICAL MODELS; PISTONS; WEAR RESISTANCE;

BIAS VOLTAGE; POWER DENSITY; PROCESS PARAMETERS; WEAR RESISTANT COATINGS;

DIAMOND LIKE CARBON FILMS;

EID: 33751367870     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.04.001     Document Type: Article

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