A method of determining the elastic properties of diamond-like carbon films

Diamond and Related Materials

Volumn 8, Issue 6, 1999, Pages 1067-1072

  Cho, S J ^a   Lee, K R ^a   Eun, K Y ^a   Jeong, J H ^b   Kwon, D ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Diamond like carbon; Elastic properties; Micromachining; PACVD

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; COMPRESSIVE STRESS; DEPOSITION; ELASTIC MODULI; ELASTICITY; MICROMACHINING; POISSON RATIO; RESIDUAL STRESSES; SILICON WAFERS; STRAIN; STRESS RELAXATION;

DIAMOND LIKE CARBON (DLC) FILMS;

AMORPHOUS FILMS;

EID: 0032660837     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(99)00089-8     Document Type: Article

References (19)

1. Fujimori N. New Diamond. 3:1989;20.
2. T. Imai, H. Nakahata, N. Fujimori, US Patent 4 952 832, 1990.
3. Angus J.C., Koidl P., Domitz S. Mort J., Jansen F. Plasma Deposited Thin Films. 1986;89 CRC, Boca Raton, FL.
4. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
5. Sandercook J.R. Light Scattering in Solids. Cardona M., Güntherodt G. Topics in Applied Physics. vol. 51:1982;173 Springer, Berlin.
6. Scheider D., Scheibe H.-J., Schwarz T., Hess P. Diamond Relat. Mater. 2:1992;92.
7. Elkhakani M.A., Chaker M., Jean A., Boily S., Kieffer J.C., O'Hern M.E., Ravet M.F., Rousseaux F. J. Mater. Res. 9:1994;96.
8. Berry B.S., Pritchet W.C., Cuomo J.J., Guarnieri C.R., Whitehair S.J. Appl. Phys. Lett. 57:1990;32.
9. Lee K.-R., Baik Y.-J., Eun K.Y. MRS Proc. 308:1993;101.
10. S.-J. Cho, K.-R. Lee, K.Y. Eun, J.H. Hahn, D.-H. Ko, Thin Solid Films (in press).
11. Cho S.-J., Lee K.-R., Eun K.Y., Hahn J.H., Ko D.-H. MRS Proc. 505:1998;33.
12. Lee K.-R., Baik Y.-J., Eun K.Y. Diamond Relat. Mater. 2:1993;910.
13. Brenner A., Senderoff S. J. Res. Natl Bur. Stand. 42:1949;105.
14. Lee K.-R., Baik Y.-J., Eun K.Y. Diamond Relat. Mater. 3:1994;1230.
15. Evans A.G., Hutchinson J.W. Int. J. Solids Structures. 20:1983;455.
16. Timoshenko S., Gere J. Theory of Elastic Stability. 2nd ed. 1961;McGraw-Hill, New York.
17. Jiang X., Riechelt K., Stritzker B. J. Appl. Phys. 68:1990;1018.
18. Pivin J.C. Thin Solid Films. 229:1993;83.
19. Reid C.N. Deformation Geometry for Materials Scientists. 1st ed. 1973;Pergamon Press, Hungary.