The subimplantation model for diamond-like carbon films deposited by methane gas decomposition

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 495-499

  Lacerda, R G ^a   Marques, F C ^a   Freire Jr, F L ^b  

^a UNIVERSITY OF CAMPINAS   (Brazil)

^b PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO   (Brazil)

Author keywords

Diamond like carbon; Methane plasma deposition; Subimplantation model

Indexed keywords

CARBON; CATHODES; DECOMPOSITION; ION BEAMS; MATHEMATICAL MODELS; METHANE; SPUTTER DEPOSITION; STRESS ANALYSIS;

DIAMOND-LIKE CARBON FILMS; METHANE PLASMA DEPOSITION;

AMORPHOUS FILMS;

EID: 0032620584     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00349-5     Document Type: Article

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