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Volumn 180-181, Issue , 2004, Pages 259-264
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Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques
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Author keywords
A C:H films; Mechanical properties; Nano indentation; Nano scratching; PECVD
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Indexed keywords
BIOMEDICAL ENGINEERING;
CARBON;
ELASTIC MODULI;
HARDNESS;
HYDROGENATION;
INDENTATION;
MICROELECTRONICS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
NANO-SCRATCHING;
AMORPHOUS FILMS;
COATING;
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EID: 16744363157
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.10.035 Document Type: Article |
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Times cited : (39)
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References (9)
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